Advances in Atomic Layer Deposition and Etching
Course 0000000752 in WS 2021/2
General Data
| Course Type | introductory seminar |
|---|---|
| Semester Weekly Hours | 2 SWS |
| Organisational Unit | Experimental Semiconductor Physics |
| Lecturers |
Ian Sharp Assistants: Alexander Henning |
| Dates |
Tue, 14:00–16:00, WSI S402 |
Assignment to Modules
-
PH1539: Fortschritte in der Atomlagenabscheidung (ALD) und Atomlagenätzung (ALE) für Bachelorstudierende / Advances in Atomic Layer Deposition and Etching for B.Sc. Students
This module is included in the following catalogs:- Catalogue of student seminars for the Bachelor's programme Physics
-
PH1540: Fortschritte in der Atomlagenabscheidung (ALD) und Atomlagenätzung (ALE) für Masterstudierende / Advances in Atomic Layer Deposition and Etching for M.Sc. Students
This module is included in the following catalogs:- Catalogue of student seminars for condensed matter physics
- Catalogue of student seminars for Applied and Engineering Physics
Further Information
Courses are together with exams the building blocks for modules. Please keep in mind that information on the contents, learning outcomes and, especially examination conditions are given on the module level only – see section "Assignment to Modules" above.
| additional remarks | |
|---|---|
| Links |
E-Learning course (e. g. Moodle) TUMonline entry TUMonline registration |
Equivalent Courses (e. g. in other semesters)
| Semester | Title | Lecturers | Dates |
|---|---|---|---|
| WS 2022/3 | Advances in Atomic Layer Deposition and Etching | Sharp, I. | dates in groups |
| SS 2022 | Advances in Atomic Layer Deposition and Etching |
Sharp, I.
Assistants: Henning, A. |
Tue, 14:00–16:00, WSI S402 |