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Advances in Atomic Layer Deposition and Etching

Course 0000000752 in WS 2022/3

General Data

Course Type introductory seminar
Semester Weekly Hours 2 SWS
Organisational Unit Experimental Semiconductor Physics
Lecturers Ian Sharp
Assistants:
Alexander Henning
Dates 14 dates in groups

Assignment to Modules

Further Information

Courses are together with exams the building blocks for modules. Please keep in mind that information on the contents, learning outcomes and, especially examination conditions are given on the module level only – see section "Assignment to Modules" above.

additional remarks
Links E-Learning course (e. g. Moodle)
TUMonline entry

Equivalent Courses (e. g. in other semesters)

SemesterTitleLecturersDates
SS 2022 Advances in Atomic Layer Deposition and Etching Sharp, I.
Assistants: Henning, A.
Tue, 14:00–16:00, WSI S402
WS 2021/2 Advances in Atomic Layer Deposition and Etching Sharp, I.
Assistants: Henning, A.
Tue, 14:00–16:00, WSI S402
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