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Advances in Atomic Layer Deposition and Etching for B.Sc. Students

Module PH1539

This module handbook serves to describe contents, learning outcome, methods and examination type as well as linking to current dates for courses and module examination in the respective sections.

Basic Information

PH1539 is a semester module in language at which is offered irregularly.

This Module is included in the following catalogues within the study programs in physics.

  • Catalogue of student seminars for the Bachelor's programme Physics

If not stated otherwise for export to a non-physics program the student workload is given in the following table.

Total workloadContact hoursCredits (ECTS)
120 h 60 h 4 CP

Responsible coordinator of the module PH1539 is Ian Sharp.

Content, Learning Outcome and Preconditions


This seminar will provide students with the opportunity to give presentations on recent topics in the field of atomic layer deposition (ALD) and atomic layer etching (ALE). Special foci will be on use of ALD and ALE for modern nanomaterial and nanodevice fabrication, with applications including advanced optoelectronics, energy harvesting and storage, and catalysis; control of physical properties of materials deposited by ALD; interfacial reaction mechanisms and in situ process monitoring; and emerging trends and advanced variants of ALD and ALE processes.

Learning Outcome

After successful participation in the module the students can:

  • Use and critically evaluate basic methods of literature retrieval,
  • Condense their knowledge from scientific papers into a presentation and obtain presentation skills,
  • Acquire additional knowledge about recent topics in the field of atomic layer deposition and atomic layer etching.


No preconditions required.

Courses, Learning and Teaching Methods and Literature

Courses and Schedule

PS 2 Advances in Atomic Layer Deposition and Etching Sharp, I.
Assistants: Henning, A.
Tue, 14:00–16:00, WSI S402
RE 2 Revision Course to Advances in Atomic Layer Deposition and Etching
Responsible/Coordination: Sharp, I.

Learning and Teaching Methods

Active and passive participation in scientific presentations and the associated discussion.


Power point presentations and open discussions.


To be determined individually.

Module Exam

Description of exams and course work

In the course of the seminar each student individually prepares a talk on a topic of current research. Based on this talk the learning outcome is tested.

Current exam dates

Currently TUMonline lists the following exam dates. In addition to the general information above please refer to the current information given during the course.

Seminar Talk in Advances in Atomic Layer Deposition and Etching for B.Sc. Students
Mon, 2022-02-07 Dummy-Termin, Leistung wird im Rahmen der Veranstaltung erbracht. // Dummy date. Course work during the semester. till 2022-02-06
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