Ph.D. Alexander Henning Phone +49 89 289-11491+49 89 289-12752 Room – E-Mail alex.henning@tum.de Links Page in TUMonline Group Experimental Semiconductor Physics Courses and Dates WS 2021/2 Title and Module Assignment ArtSWSLecturer(s)Dates Advances in Atomic Layer Deposition and Etching Assigned to modules: PH1539: Fortschritte in der Atomlagenabscheidung (ALD) und Atomlagenätzung (ALE) für Bachelorstudierende / Advances in Atomic Layer Deposition and Etching for B.Sc. Students PH1540: Fortschritte in der Atomlagenabscheidung (ALD) und Atomlagenätzung (ALE) für Masterstudierende / Advances in Atomic Layer Deposition and Etching for M.Sc. Students PS 2 Sharp, I. Assisstants: Henning, A.