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Colloquium on Current Problems of Clean Room Technology and Processing
Kolloquium zu aktuellen Fragen der Reinraumtechnik und Prozessierung

Course 0000001348 in WS 2015/6

General Data

Course Type Colloquium
Semester Weekly Hours 3 SWS
Organisational Unit TUPHE10
Lecturers Marc Wilde
Responsible/Coordination: Christian Pfleiderer
Dates Fri, 09:30–11:45, PH 2024

Assignment to Modules

This course is not assigned to any module.

Further Information

Courses are together with exams the building blocks for modules. Please keep in mind that information on the contents, learning outcomes and, especially examination conditions are given on the module level only – see section "Assignment to Modules" above.

additional remarks In dem Kolloquium werden physikalische und technische Aspekte der Reinraumprozessierung von mikro- und nanostrukturierten Festkörpersystemen an ausgewählten Beispielen vorgestellt und diskutiert. Im Rahmen des Kolloquiums werden auf der Basis neuester Erkennisse die speziellen Verhaltensmaßnahmen in staubfreien und temperaturstablisierten Reinräumen, die sicherheitstechnischen Aspekte sowie der sichere Probentransfer zwischen Reinräumen und Beschichtungsanlagen vermittelt. Das vermittelte Wissen wird inhaltlich an verschiedenen Kolloquiumsterminen abgefragt und überprüft.
Links TUMonline entry

Equivalent Courses (e. g. in other semesters)

SemesterTitleLecturersDates
SS 2018 Colloquium on Semiconductor Processing Technology and Micromechanics Pfleiderer, C. Wed, 16:00–18:15, PH 2224
WS 2017/8 Colloquium on Current Problems of Clean Room Technology and Processing Wilde, M.
Responsible/Coordination: Pfleiderer, C.
Mon, 14:15–16:30, PH 2224
SS 2017 Colloquium on Semiconductor Processing Technology and Micromechanics Wilde, M.
Responsible/Coordination: Pfleiderer, C.
Fri, 09:30–11:45, PH 2024
WS 2016/7 Colloquium on Current Problems of Clean Room Technology and Processing Wilde, M.
Responsible/Coordination: Pfleiderer, C.
Fri, 09:30–11:45, PH 2024
SS 2016 Colloquium on Semiconductor Processing Technology and Micromechanics Wilde, M.
Responsible/Coordination: Pfleiderer, C.
Fri, 09:30–11:45, PH 2024
SS 2015 Colloquium on Semiconductor Processing Technology and Micromechanics Wilde, M.
Responsible/Coordination: Pfleiderer, C.
Fri, 09:30–11:45, PH 2024
WS 2014/5 Colloquium on Current Problems of Clean Room Technology and Processing Wilde, M.
Responsible/Coordination: Grundler, D.
SS 2014 Colloquium on Semiconductor Processing Technology and Micromechanics Wilde, M.
Responsible/Coordination: Grundler, D.
WS 2013/4 Colloquium on Current Problems of Clean Room Technology and Processing Wilde, M.
Responsible/Coordination: Grundler, D.
SS 2013 Colloquium on Clean Room and Processing Technology Wilde, M.
Responsible/Coordination: Grundler, D.
WS 2012/3 Colloquium on Current Problems of Clean Room Technology and Processing Wilde, M.
Responsible/Coordination: Grundler, D.
SS 2012 Colloquium on Semiconductor Processing Technology and Micromechanics Wilde, M.
Responsible/Coordination: Grundler, D.
WS 2011/2 Colloquium on Current Problems of Clean Room Technology and Processing Wilde, M.
Responsible/Coordination: Grundler, D.
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