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Revision Course to Advances in Atomic Layer Deposition and Etching
Repetitorium zu Fortschritte in der Atomlagenabscheidung (ALD) und Atomlagenätzung (ALE)

Course 0000000454 in WS 2021/2

General Data

Course Type revision course
Semester Weekly Hours 2 SWS
Organisational Unit Experimental Semiconductor Physics
Lecturers Responsible/Coordination: Ian Sharp

Assignment to Modules

Further Information

Courses are together with exams the building blocks for modules. Please keep in mind that information on the contents, learning outcomes and, especially examination conditions are given on the module level only – see section "Assignment to Modules" above.

additional remarks
Links TUMonline entry
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