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Plasma processes in micro system technologies
Plasmaverfahren in der Mikrosystemtechnik

Course 0000000903 in SS 2015

General Data

Course Type Lecture
Semester Weekly Hours 2 SWS
Organisational Unit Associate Professorship of Micro-Mechatronical Systems (N.N.)
Lecturers
Dates Wed, 13:15–14:45, N1414

Further Information

Courses are together with exams the building blocks for modules. Please keep in mind that information on the contents, learning outcomes and, especially examination conditions are given on the module level only – see section "Assignment to Modules" above.

additional remarks Plasma processes, Ionization, plasma parameter, measurements of plasma parameter, reactors, vacuum technology and instrumentation, plasma etching, plasma enhanced deposition
Links E-Learning course (e. g. Moodle)
TUMonline entry

Equivalent Courses (e. g. in other semesters)

SemesterTitleLecturersDates
SS 2014 Plasma processes in micro system technologies Wed, 13:15–14:45, N1414
SS 2013 Plasma processes in micro system technologies
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