Plasma processes in micro system technologies
Plasmaverfahren in der Mikrosystemtechnik
Course 0000000903 in SS 2013
|Semester Weekly Hours||2 SWS|
|Organisational Unit||Associate Professorship of Micro-Mechatronical Systems (N.N.)|
Courses are together with exams the building blocks for modules. Please keep in mind that information on the contents, learning outcomes and, especially examination conditions are given on the module level only – see section "Assignment to Modules" above.