Plasma processes in micro system technologies
Plasmaverfahren in der Mikrosystemtechnik
Course 0000000903 in SS 2014
General Data
Course Type | lecture |
---|---|
Semester Weekly Hours | 2 SWS |
Organisational Unit | Associate Professorship of Micro-Mechatronical Systems (N.N.) |
Lecturers | |
Dates |
Wed, 13:15–14:45, N1414 |
Further Information
Courses are together with exams the building blocks for modules. Please keep in mind that information on the contents, learning outcomes and, especially examination conditions are given on the module level only – see section "Assignment to Modules" above.
additional remarks | Plasma processes, Ionization, plasma parameter, measurements of plasma parameter, reactors, vacuum technology and instrumentation, plasma etching, plasma enhanced deposition |
---|---|
Links |
E-Learning course (e. g. Moodle) TUMonline entry |
Equivalent Courses (e. g. in other semesters)
Semester | Title | Lecturers | Dates |
---|---|---|---|
SS 2015 | Plasma processes in micro system technologies |
Wed, 13:15–14:45, N1414 |
|
SS 2013 | Plasma processes in micro system technologies |