Plasma processes in micro system technologies Tutorial
Plasmaverfahren in der Mikrosystemtechnik Übung
Course 0000000904 in SS 2013
General Data
| Course Type | exercise |
|---|---|
| Semester Weekly Hours | 1 SWS |
| Organisational Unit | Associate Professorship of Micro-Mechatronical Systems (N.N.) |
| Lecturers | |
| Dates |
Further Information
Courses are together with exams the building blocks for modules. Please keep in mind that information on the contents, learning outcomes and, especially examination conditions are given on the module level only – see section "Assignment to Modules" above.
| additional remarks | |
|---|---|
| Links | TUMonline entry |
Equivalent Courses (e. g. in other semesters)
| Semester | Title | Lecturers | Dates |
|---|---|---|---|
| SS 2015 | Plasma processes in micro system technologies Tutorial |
Wed, 15:00–16:30, N1414 |
|
| SS 2014 | Plasma processes in micro system technologies Tutorial |
Mon, 15:00–16:30, N1414 |