Module version of WS 2021/2 (current)
There are historic module descriptions of this module. A module description is valid until replaced by a newer one.
Whether the module’s courses are offered during a specific semester is listed in the section Courses, Learning and Teaching Methods and Literature below.
|available module versions|
|WS 2021/2||WS 2020/1||WS 2019/20||WS 2018/9||WS 2017/8||WS 2014/5||WS 2012/3|
PH9027 is a semester module in English language at Bachelor’s level which is offered in winter semester.
This Module is included in the following catalogues within the study programs in physics.
- Service Modules for Students of other Disciplines
If not stated otherwise for export to a non-physics program the student workload is given in the following table.
|Total workload||Contact hours||Credits (ECTS)|
|150 h||45 h||5 CP|
Responsible coordinator of the module PH9027 is Gregor Koblmüller.
Content, Learning Outcome and Preconditions
The lecture focuses on various methods of nanofabrication (optical, electron beam lithography, focused ion beam) and newer emerging techni¬ques (x-ray lithography, nanoimprint, etc.). In particular the physical principles are discussed and limitations for the various methods given. Various synthesis and crystal growth methods for advanced semiconductor nanostructures will be further introduced such as chemical and physical vapor phase epitaxial techniques (MOVPE, MBE, etc.) and the physical growth principles of 0D,1D, and 2D materials highlighted. Examples will be given where these low-dimensional nanostructures are implemented into cutting-edge technological applications. The second part of this lecture deals with specific nanoanalytical methods required for characterization of structural, surface and atomic properties of nanofabricated and synthesized materials. These include electron microscopy, surface analytical methods, ion beam analytical techniques, x-ray techniques, and some new sophisticated techniques, such as atom probe tomography, etc.
After successful participation and engagement in the module "Nanotechnologies" students will have gained:
- basic knowledge in nanofabrication and analysis of mainly semiconductor-based devices,
- the capability to select and evaluate specific nanofabrication methods relevant for nanotechnological applications,
- the possibility to explore the limits of the various methodologies,
- the capability for structural, atomic and interface specific analysis of nanostructured materials, and
- the important knowledge in understanding the complex interplay between material synthesis, structural and electronic properties of materials, and their effect on functionalities in cutting-edge device applications.
Basics in Solid State Physics
Courses, Learning and Teaching Methods and Literature
Courses and Schedule
|VU||3||Nanofabrication and Nanoanalytics||Koblmüller, G.||
Thu, 12:15–14:30, WSI S101
Learning and Teaching Methods
The module consists of a lecture and an exercise. In the thematically structured lecture, the contents of the course are presented in a presentation and conveyed through vivid examples and discussion with the students. Students are also motivated to independently deal with the topics covered and to study the relevant literature.
In the exercises the students learn to solve tasks independently. Here, task sheets can be completed for independent review and consolidation of the learned methods. The students' tasks are discussed and checked with a research assistant.
Vorlesungsfolien und darin enthaltene Referenzen
Description of exams and course work
The examination will take the form of a 90-minute written test. No additional aids are allowed. Students have to demonstrate that they are able to assess semiconductor-based manufacturing techniques and analytical methods in nanotechnology. By answering comprehension questions, they must demonstrate their knowledge of the relationships between the physical properties of the respective methods, the defined limits and application areas in material production and the structural and electronic properties of different material systems.
The exam may be repeated at the end of the semester.
Current exam dates
Currently TUMonline lists the following exam dates. In addition to the general information above please refer to the current information given during the course.
|Exam to Nanotechnologies|
|Fri, 2023-08-11, 11:00 till 12:30||1550
|till 2023-06-30 (cancelation of registration till 2023-08-04)|