Nanofabrication and Nanoanalytics
Module version of WS 2017/8
There are historic module descriptions of this module. A module description is valid until replaced by a newer one.
Whether the module’s courses are offered during a specific semester is listed in the section Courses, Learning and Teaching Methods and Literature below.
|available module versions|
|WS 2019/20||WS 2018/9||WS 2017/8||WS 2014/5||WS 2012/3|
PH9027 is a semester module in German or English language at Bachelor’s level which is offered in winter semester.
This Module is included in the following catalogues within the study programs in physics.
- Service Modules for Students of other Disciplines
If not stated otherwise for export to a non-physics program the student workload is given in the following table.
|Total workload||Contact hours||Credits (ECTS)|
|150 h||45 h||5 CP|
Responsible coordinator of the module PH9027 in the version of WS 2017/8 was Gregor Koblmüller.
Content, Learning Outcome and Preconditions
The lecture focuses on various methods of nanofabrication (optical, electron beam lithography, focused ion beam) and newer emerging techni¬ques (x-ray lithography, nanoimprint, etc.). In particular the physical principles are discussed and limitations for the various methods given. Various synthesis and crystal growth methods for advanced semiconductor nanostructures will be further introduced such as chemical and physical vapor phase epitaxial techniques (MOVPE, MBE, etc.) and the physical growth principles of 0D,1D, and 2D materials highlighted. Examples will be given where these low-dimensional nanostructures are implemented into cutting-edge technological applications. The second part of this lecture deals with specific nanoanalytical methods required for characterization of structural, surface and atomic properties of nanofabricated and synthesized materials. These include electron microscopy, surface analytical methods, ion beam analytical techniques, x-ray techniques, and some new sophisticated techniques, such as atom probe tomography, etc.
After successful participation and engagement in the lecture "Material Modelling" students will have gained:
- basic knowledge in nanofabrication and analysis of mainly semiconductor-based devices,
- the capability to select and evaluate specific nanofabrication methods relevant for nanotechnological applications,
- the possibility to explore the limits of the various methodologies,
- the capability for structural, atomic and interface specific analysis of nanostructured materials, and
- the important knowledge in understanding the complex interplay between material synthesis, structural and electronic properties of materials, and their effect on functionalities in cutting-edge device applications.
Basics in Solid State Physics
Courses, Learning and Teaching Methods and Literature
Courses and Schedule
Tue, 09:30–11:00, virtuell
|UE||1||Exercise to Nanotechnologies||
Responsible/Coordination: Koblmüller, G.
|dates in groups|
Learning and Teaching Methods
Vorlesung: Darbietendes Lehrverfahren
Vorlesungsfolien und darin enthaltene Referenzen
Description of exams and course work
In a written exam the learning success is checked using comprehension questions and calculation problems.
Current exam dates
Currently TUMonline lists the following exam dates. In addition to the general information above please refer to the current information given during the course.
|Exam to Nanotechnologies|
|Mon, 2021-03-22, 14:15 till 15:45||0.001
||Bitte lesen Sie vor der Anmeldung die Hinweise unter https://www.tum.de/die-tum/aktuelles/coronavirus/corona-lehre-pruefungen/ - insbesondere, wann Sie nicht zur Prüfung erscheinen dürfen und, was Sie beachten sollten, wenn Sie einer Risikogruppe für einen schweren Verlauf einer COVID-19-Erkrankung angehören. // Please read the information at https://www.tum.de/en/about-tum/news/coronavirus/corona-teaching-exams/ carefully - especially the conditions in which you must not come to the exam and the necessary measures if you belong to a risk group for a severe progression of a COVID-19 case.||till 2021-01-15 (cancelation of registration till 2021-03-15)|