This module handbook serves to describe contents, learning outcome, methods and examination type as well as linking to current dates for courses and module examination in the respective sections.
Module version of WS 2019/20 (current)
There are historic module descriptions of this module. A module description is valid until replaced by a newer one.
|available module versions|
|WS 2019/20||WS 2018/9||WS 2017/8||WS 2014/5||WS 2012/3|
PH9027 is a semester module in English language at Bachelor’s level which is offered in winter semester.
This module description is valid from WS 2019/20 .
If not stated otherwise for export to a non-physics program the student workload is given in the following table.
|Total workload||Contact hours||Credits (ECTS)|
|150 h||45 h||5 CP|
Responsible coordinator of the module PH9027 is Gregor Koblmüller.
Content, Learning Outcome and Preconditions
The lecture focuses on various methods of nanofabrication (optical, electron beam lithography, focused ion beam) and newer emerging techni¬ques (x-ray lithography, nanoimprint, etc.). In particular the physical principles are discussed and limitations for the various methods given. Various synthesis and crystal growth methods for advanced semiconductor nanostructures will be further introduced such as chemical and physical vapor phase epitaxial techniques (MOVPE, MBE, etc.) and the physical growth principles of 0D,1D, and 2D materials highlighted. Examples will be given where these low-dimensional nanostructures are implemented into cutting-edge technological applications. The second part of this lecture deals with specific nanoanalytical methods required for characterization of structural, surface and atomic properties of nanofabricated and synthesized materials. These include electron microscopy, surface analytical methods, ion beam analytical techniques, x-ray techniques, and some new sophisticated techniques, such as atom probe tomography, etc.
After successful participation and engagement in the lecture "Material Modelling" students will have gained:
- basic knowledge in nanofabrication and analysis of mainly semiconductor-based devices,
- the capability to select and evaluate specific nanofabrication methods relevant for nanotechnological applications,
- the possibility to explore the limits of the various methodologies,
- the capability for structural, atomic and interface specific analysis of nanostructured materials, and
- the important knowledge in understanding the complex interplay between material synthesis, structural and electronic properties of materials, and their effect on functionalities in cutting-edge device applications.
Basics in Solid State Physics
Courses, Learning and Teaching Methods and Literature
Courses and Schedule
|VO||2||Nanofabrication and Nanoanalytics||Koblmüller, G.||
Tue, 09:30–11:00, ZEI 0001
and singular or moved dates
|UE||1||Exercise to Nanofabrication and Nanoanalytics||
Responsible/Coordination: Koblmüller, G.
|dates in groups|
Learning and Teaching Methods
Vorlesung: Darbietendes Lehrverfahren
Vorlesungsfolien und darin enthaltene Referenzen
Description of exams and course work
The exam may be repeated at the end of the semester.
Current exam dates
Currently TUMonline lists the following exam dates. In addition to the general information above please refer to the current information given during the course.
|Prüfung zu Nanofabrikation und Nanoanalytik|
|Mo, 12.8.2019, 8:00 bis 9:30||MW: 1450
||bis 30.6.2019 (Abmeldung bis 5.8.2019)|