Nanofabrication and Nanoanalytics

Module PH9027

This module handbook serves to describe contents, learning outcome, methods and examination type as well as linking to current dates for courses and module examination in the respective sections.

Module version of WS 2014/5 (current)

There are historic module descriptions of this module. A module description is valid until replaced by a newer one.

available module versions
WS 2014/5WS 2012/3

Basic Information

PH9027 is a semester module in German or English language at Bachelor’s level which is offered in winter semester.

This Module is included in the following catalogues within the study programs in physics.

  • Service Modules for Students of other Disciplines

If not stated otherwise for export to a non-physics program the student workload is given in the following table.

Total workloadContact hoursCredits (ECTS)
150 h 45 h 5 CP

Responsible coordinator of the module PH9027 is the Dean of Studies at Physics Department.

Content, Learning Outcome and Preconditions


The lecture focuses on various methods of nanofabrication (optical, electron beam lithography, focused ion beam) and newer emerging techni¬ques (x-ray lithography, nanoimprint, etc.). In particular the physical principles are discussed and limitations for the various methods given. Various synthesis and crystal growth methods for advanced semiconductor nanostructures will be further introduced such as chemical and physical vapor phase epitaxial techniques (MOVPE, MBE, etc.) and the physical growth principles of 0D,1D, and 2D materials highlighted. Examples will be given where these low-dimensional nanostructures are implemented into cutting-edge technological applications. The second part of this lecture deals with specific nanoanalytical methods required for characterization of structural, surface and atomic properties of nanofabricated and synthesized materials. These include electron microscopy, surface analytical methods, ion beam analytical techniques, x-ray techniques, and some new sophisticated techniques, such as atom probe tomography, etc.

Learning Outcome

After successful participation and engagement in the lecture "Material Modelling" students will have gained:

  1. basic knowledge in nanofabrication and analysis of mainly semiconductor-based devices,
  2. the capability to select and evaluate specific nanofabrication methods relevant for nanotechnological applications,
  3. the possibility to explore the limits of the various methodologies,
  4. the capability for structural, atomic and interface specific analysis of nanostructured materials, and
  5. the important knowledge in understanding the complex interplay between material synthesis, structural and electronic properties of materials, and their effect on functionalities in cutting-edge device applications.


Basics in Solid State Physics

Courses, Learning and Teaching Methods and Literature

Courses and Schedule

VU 3 Nanofabrication and Nanoanalytics Koblmüller, G. Mittwoch, 09:30–11:45

Learning and Teaching Methods

Vorlesung: Darbietendes Lehrverfahren


Präsentation, Laborbesichtigung


Vorlesungsfolien und darin enthaltene Referenzen

Module Exam

Description of exams and course work

In a written exam the learning success is checked using comprehension questions and calculation problems.

Current exam dates

Currently TUMonline lists the following exam dates. In addition to the general information above please refer to the current information given during the course.

Prüfung zu Nanofabrikation und Nanoanalytik
Mo, 6.3.2017, 11:00 bis 12:30 00.02.001
MI: 00.02.001
bis 15.1.2017 (Abmeldung bis 27.2.2017)

Condensed Matter

When atoms interact things can get interesting. Fundamental research on the underlying properties of materials and nanostructures and exploration of the potential they provide for applications.

Nuclei, Particles, Astrophysics

A journey of discovery to understanding our world at the subatomic scale, from the nuclei inside atoms down to the most elementary building blocks of matter. Are you ready for the adventure?


Biological systems, from proteins to living cells and organisms, obey physical principles. Our research groups in biophysics shape one of Germany's largest scientific clusters in this area.