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Semiconductor Nanofabrication and Nano-analytical Methods

Module PH2180

This module handbook serves to describe contents, learning outcome, methods and examination type as well as linking to current dates for courses and module examination in the respective sections.

Basic Information

PH2180 is a semester module in German or English language at Master’s level which is offered in winter semester.

This module description is valid to WS 2013/4.

If not stated otherwise for export to a non-physics program the student workload is given in the following table.

Total workloadContact hoursCredits (ECTS)
300 h 75 h 10 CP

Responsible coordinator of the module PH2180 is the Dean of Studies at Physics Department.

Content, Learning Outcome and Preconditions


The couse focuses on various methods of nanofabrication (optical, electron beam lithography, focused ion beam) and newer emerging techni¬ques (x-ray lithography, nanoimprint, etc.). In particular the physical principles are discussed and limitations for the various methods given. Various synthesis and crystal growth methods for advanced semiconductor nanostructures will be further introduced such as chemical and physical vapor phase epitaxial techniques (MOVPE, MBE, etc.) and the physical growth principles of 0D,1D, and 2D materials highlighted. Examples will be given where these low-dimensional nanostructures are implemented into cutting-edge technological applications. The second part of this lecture deals with specific nanoanalytical methods required for characterization of structural, surface and atomic properties of nanofabricated and synthesized materials. These include electron microscopy, surface analytical methods, ion beam analytical techniques, x-ray techniques, and some new sophisticated techniques, such as atom probe tomography, etc.

Learning Outcome

After successful completing of the module students will have gained:

  1. basic knowledge in nanofabrication and analysis of mainly semiconductor-based devices,
  2. the capability to select and evaluate specific nanofabrication methods relevant for nanotechnological applications,
  3. the possibility to explore the limits of the various methodologies,
  4. the capability for structural, atomic and interface specific analysis of nanostructured materials, and
  5. the important knowledge in understanding the complex interplay between material synthesis, structural and electronic properties of materials, and their effect on functionalities in cutting-edge device applications.


Basics in Solid State Physics

Courses, Learning and Teaching Methods and Literature

Courses and Schedule

VU 4 Semiconductor Nanofabrication and Nano-analytical Methods Koblmüller, G. Tue, 09:30–11:45, IAS 0.001

Learning and Teaching Methods

Lecture: Lecture presentation


Class-room Presentation, Lab visit


Lecture Notes and references therein

Module Exam

Description of exams and course work

In an oral exam the learning outcome is tested using comprehension questions and sample problems.

In accordance with §12 (8) APSO the exam can be done as a written test. In this case the time duration is 90 minutes.

Exam Repetition

The exam may be repeated at the end of the semester.

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