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Nanoanalytics (Characterization of Semiconductor Nanostructures)

Module PH2153

This module handbook serves to describe contents, learning outcome, methods and examination type as well as linking to current dates for courses and module examination in the respective sections.

Basic Information

PH2153 is a semester module in English or German language at Master’s level which is offered in summer semester.

If not stated otherwise for export to a non-physics program the student workload is given in the following table.

Total workloadContact hoursCredits (ECTS)
150 h 40 h 5 CP

Responsible coordinator of the module PH2153 is Gregor Koblmüller.

Content, Learning Outcome and Preconditions


This module gives an introductory in nanoanalytics. The general scheme of scanning probe microscopy will be introduced. In particular, the physics of electron microscopy methods, such as scanning electron electron microscopy, transmission electron microscopy, high-resolution electron microscopy, and scanning tunneling electron microscopy, are discussed. Furthermore, focused ion microscopy and lithography techniques are explained. A further emphasis is put on methods for surface analysis. These comprise Auger electron spectroscopy, x-ray photoelectron spectroscopy, and secondary ion mass spectrometry. In addition, x-ray reflectrometry and diffraction will be introduction.

Learning Outcome

After a successful participation of the module, the student is able to:
1) differentiate and name the physics of scanning probe microscopy methods.
3) explain focused ion micrometry and lithograpy.
4) discuss and explain techniques for the surface analysis.
5) explain and specify the x-ray reflectrometry and diffraction.


There are no access requirements beyond the ones for the master study.

Courses, Learning and Teaching Methods and Literature

Courses and Schedule

Learning and Teaching Methods

Lecture, beamer presentation, board work, exercises in individual and group work, discussion


Lecture script, practise sheets, accompanying internet site, complementary literature


Czichos, Horst; Saito, Tetsuya; Smith, Leslie (Editors): “Springer Handbook of Materials Measurement Methods”, (2006).

Module Exam

Description of exams and course work

In an oral exam the learning outcome is tested using comprehension questions and sample problems.

In accordance with §12 (8) APSO the exam can be done as a written test. In this case the time duration is 60 minutes.

Exam Repetition

The exam may be repeated at the end of the semester.

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