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Semiconductor Surfaces and Interfaces

Module EI7626

This Module is offered by TUM Department of Electrical and Computer Engineering.

This module handbook serves to describe contents, learning outcome, methods and examination type as well as linking to current dates for courses and module examination in the respective sections.

Module version of WS 2018/9

There are historic module descriptions of this module. A module description is valid until replaced by a newer one.

Whether the module’s courses are offered during a specific semester is listed in the section Courses, Learning and Teaching Methods and Literature below.

available module versions
WS 2019/20WS 2018/9WS 2015/6WS 2013/4

Basic Information

EI7626 is a semester module in German or English language at Master’s level which is offered in winter semester.

This Module is included in the following catalogues within the study programs in physics.

  • Catalogue of non-physics elective courses
Total workloadContact hoursCredits (ECTS)
150 h 45 h 5 CP

Content, Learning Outcome and Preconditions


Preparation; Surface analysis and characterization techniques; Morphology and structure; Electronic properties; Heterointerfaces, dielectric and metal thin film coatings; Liquid-solid interface; Organic self-assembled monolayers; Bio-functionalization; Device applications

Learning Outcome

Understanding the basic techniques for the preparation and characterization of semiconductor surfaces; gaining fundamental knowledge about the properties of the most important heterointerfaces; ability to evaluate functional semiconductor thin-film coatings in device applications


Students should have passed following modules before taking the course:

- Materials
- Electronic Devices

Courses, Learning and Teaching Methods and Literature

Courses and Schedule

Learning and Teaching Methods

In addition to classical lecture presentation and individual study methods of the students, exercises and additional tutorials will be provided, targeting at a deeper level of understanding. The students will get in early contact with current research topics, also by lab visits.


The following media will be used for teaching purposes:

- Presentations, handout notes, blackboard notes, tablet-PC, lab tours


"Solid Surfaces, Interfaces and Thin Films, H. Lüth, 5th Ed., Springer (2010)

Physics of Semiconductor Devices, S.M. Sze, K.K. Ng, Wiley (2007)

Nanoelectronics and Information Technology. Advanced Electronic Materials and Novel Devices, R. Waser (Ed.), 3rd Ed., Wiley-VCH (2012)

Additional reading material, class notes and useful web sources will be provided to the students on"

Module Exam

Description of exams and course work

Written exam (60 min.);
The exam consists of problem calculations and short questions concerning the entire lecture material, they are used to test the basic understanding as well as an enhanced knowledge about the characterization of semiconductor interfaces, their properties and coatings. In total, up to 20% of the exam may comprise multiple choice tests.

Exam Repetition

There is a possibility to take the exam in the following semester.

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