Semiconductor Surfaces and Interfaces

Module EI7626

This Module is offered by TUM Department of Electrical and Computer Engineering.

This module handbook serves to describe contents, learning outcome, methods and examination type as well as linking to current dates for courses and module examination in the respective sections.

Module version of WS 2015/6 (current)

There are historic module descriptions of this module. A module description is valid until replaced by a newer one.

available module versions
WS 2015/6WS 2012/3

Basic Information

EI7626 is a semester module in German or English language at Master’s level which is offered in winter semester.

This Module is included in the following catalogues within the study programs in physics.

  • Catalogue of non-physics elective courses
Total workloadContact hoursCredits (ECTS)
150 h 45 h 5 CP

Content, Learning Outcome and Preconditions


Preparation; Surface analysis and characterization techniques; Morphology and structure; Electronic properties; Heterointerfaces, dielectric and metal thin film coatings; Liquid-solid interface; Organic self-assembled monolayers; Bio-functionalization; Device applications

Learning Outcome

Understanding the basic techniques for the preparation and characterization of semiconductor surfaces; gaining fundamental knowledge about the properties of the most important heterointerfaces; ability to evaluate functional semiconductor thin-film coatings in device applications


Students should have passed following modules before taking the course: - Materials - Electronic Devices

Courses, Learning and Teaching Methods and Literature

Courses and Schedule

VU 3 Halbleiter Ober- und Grenzflächen Tornow, M.
Mitwirkende: Saller, K.Speckbacher, M.
Freitag, 15:00–17:30

Learning and Teaching Methods

In addition to classical lecture presentation and individual study methods of the students exercises and additional tutorials will be provided, targeting at a deeper level of understanding. The students will get in early contact with current research topics by preparing an own seminar talk based on original literature and by lab visits.


The following media will be used for teaching purposes: - Presentations, handout notes, blackboard notes, tablet-PC, lab tours


"Solid Surfaces, Interfaces and Thin Films, H. Lüth, 5th Ed., Springer (2010) Physics of Semiconductor Devices, S.M. Sze, K.K. Ng, Wiley (2007) Nanoelectronics and Information Technology. Advanced Electronic Materials and Novel Devices, R. Waser (Ed.), 3rd Ed., Wiley-VCH (2012) Additional reading material, class notes and useful web sources will be provided to the students on"

Module Exam

Description of exams and course work

Module exam: - 45 min. oral examination (100%)

Exam Repetition

There is a possibility to take the exam in the following semester.

Condensed Matter

When atoms interact things can get interesting. Fundamental research on the underlying properties of materials and nanostructures and exploration of the potential they provide for applications.

Nuclei, Particles, Astrophysics

A journey of discovery to understanding our world at the subatomic scale, from the nuclei inside atoms down to the most elementary building blocks of matter. Are you ready for the adventure?


Biological systems, from proteins to living cells and organisms, obey physical principles. Our research groups in biophysics shape one of Germany's largest scientific clusters in this area.